Damage-free photoassisted cryogenic etching of GaN

 Damage-free photoassisted cryogenic etching of GaN

1998/12   J.T.Hsieh, J.M.Hwang, H.L.Hwang, W.S.Hung, and M.F.Hung

• Conference papers (會議發表):

              Damage-free photoassisted cryogenic etching of GaN, J.T.Hsieh, J.M.Hwang, H.L.Hwang, W.S.Hung, and M.F.Hung, IEDMS,1998 national cheng kung university Tainan,Taiwan,ROC DEC 20-23,1998 B1-5-p22 (oral)

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