Damage-free photoassisted cryogenic dry etching and photoelectrochemical wet etching of GaN

 Damage-free photoassisted cryogenic dry etching and photoelectrochemical wet etching of GaN

1997   J.T.Hsieh,J.M.Hwang and H.L.Hwang and W.S.Hung

• Conference papers (會議發表):

              Damage-free photoassisted cryogenic dry etching and photoelectrochemical wet etching of GaN, J.T.Hsieh,J.M.Hwang and H.L.Hwang and W.S.Hung,第十六屆光譜技術與表面科學研討會,p16 (1997) (oral)

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